基于数字化三维光刻的微纳智能制造与应用

发布时间:2023-04-04
入选理由:苏大维格联合苏州大学、维业达科技、维旺科技共同研发实现米级幅面微纳结构的高效与高精度兼容性制造,开展大面积海量数据算法、三维计算光刻、纳米增材制造和新颖光子特性数字设计等技术突破与创新。研制110吋数字化紫外三维光刻设备,解决大面积微纳模具制备;支持10.5代显示面板的柔性透明导电材料自动产线与增材制程,建成显示产业大尺寸高性能电容触控屏先进绿色产线;基于非对称微结构和双面高保真微纳压印制造,超薄导光器件的制造效率提升数倍、显示光效显著提升,能源节约效果显著。

The joint research efforts of SVG, Soochow University, IVTouch and Nicrotek have contributed to high-efficiency high-precision compatible manufacturing of meter-level breadth micro-nano structures, with breakthroughs and innovations in technologies like large-area mass data algorithms, 3D computational lithography, nano-additive manufacturing and digital design of novel photonic properties. 110-inch digital UV 3D lithography is developed to address problems in large-area micro-nano mould manufacturing. Green production lines of large-size high-performance capacitive touch screens for industrial use are constructed on the basis of automatic production lines and additive manufacturing procedures of flexible transparent conducting materials supporting Gen 10.5 display panels. Based on asymmetric micro-structures and double-face high-fidelity micro-nano stamping manufacturing technology, the manufacturing efficiency of ultrathin photoconductive devices has been improved by several times, with significant improvement in light display effects and energy conservation.
 
关键词:微纳智能制造,数字三维光刻,海量数据算法,纳米增材制造,柔性光子
Micro-nano Intelligent Manufacturing, Digital 3D Lithography, Mass Data Algorithm, Nano-additive Manufacturing, Flexible Optoelectronics